This volume contains the papers presented at the First Conference on "Microelectronics, Microsystems and Nanotechnology", held at NCSR "Demokritos" in Athens-Greece in November 20-22, 2000. Nanoscience and Nanotechnology as well as Microsystems and Sensors are among the most challenging research areas for the next years, involving multidisciplinary research, covering from Physics, Chemistry and Microelectronics to Materials Science, Biology, Medicine and many others.
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