Fabrication & Design of Resonant Microdevices

Author: Behraad Bahreyni

Description

Key features:

* Offers numerous academic and industrial examples of resonant MEMS

* Provides an analytic model of device behavior

* Explains two-port systems in detail

* Devotes ample space to excitation and signal detection methods

* Covers issues of damping and noise for resonant MEMS, two topics of particular importance for high-Q devices

Keywords

electrostatic�resonators �resonator�body �motional�resistance �actuation�purposes �bulk�resonators �sensory�applications �resonant�nodes �resonator�response �disk�resonators clamped�clamped�beam �resonant�devices �electrostatic�actuators �mass�sensor

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Fabrication & Design of Resonant Microdevices

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