Introduction to Microsystem Design

Until now, there is no textbook which describes the design of micro systems systematically. Therefore, this book was written to fill this gap. It is based on a course given at RWTH Aachen University and Tsinghua University in Beijing for undergraduate students in their fifth or higher semester. This book may be used as the basis for similar courses, for self-study, or as a reference for the experienced engineer. All the equations presented here are not limited to microsystems but are valid in general. Therefore, this book may help also engineers working in different fields.

This book does not describe the fabrication processes of MST but can be understood without knowing these processes. It provides the basic equations needed to calculate or at least estimate the order of magnitude of the effects and forces which are important in MST.