Book Statistics
2
Views
0
Comments
0
Rating
Microelectronic & Mechanical Systems.
Description
This book discusses key aspects of these technology areas, organized in twenty-seven chapters that present the latest research developments in micro electronic and mechanical systems. The book addresses a wide range of fundamental and practical issues related to MEMS, advanced metal-oxide-semiconductor (MOS) and complementary MOS (CMOS) devices, SoC technology, integrated circuit testing and verification, and other important topics in the field. Several chapters cover state-of-the-art microfabrication techniques and materials as enabling technologies for the microsystems. Reliability issues concerning both electronic and mechanical aspects of these devices and systems are also addressed in various chapters.
Reader's Comments (0)
Login to CommentNo Comments Yet
Be the first to share your thoughts about this book!