This volume contains the papers presented at the First Conference on "Microelectronics, Microsystems and Nanotechnology", held at NCSR "Demokritos" in Athens-Greece in November 20-22, 2000. The Conference was organized by the Institute of Microelectronics within the framework of the Greek Network on Microelectronics, Microsystems and Nanotechnology with the aim to gather together in an interactive forum all scientists and engineers working in Greece in the above fields, as well as internationally recognized specialists who were invited to present the latest achievements worldwide.
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